Nano·Micro Patterned Stamper
Manufacturing nano/micro patterned molds utilizing MEMS technologies.
Micro/nano patterns are transferred onto Si-wafer or Quartz by using semiconductor processes such as photolithography, scanner, laser direct writing, and Ni plating is performed according to the applications to provide Ni base molds.
Pattern size: 100nm ~ hundreds of μm, aspect ratio < 3
Pattern shape: Pillar, Grating, Pinhole, Channel, etc.
Materials: Si-wafer, Quartz, Sodalime glass, Metal, etc
microfluidic platforms for point-of-care testing, anti-reflective structures ect