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Nano·Micro Patterned Stamper

Manufacturing nano/micro patterned molds utilizing MEMS technologies.

Core technology

Micro/nano patterns are transferred onto Si-wafer or Quartz by using semiconductor processes such as photolithography, scanner, laser direct writing, and Ni plating is performed according to the applications to provide Ni base molds.

Specifications

Pattern size: 100nm ~ hundreds of μm, aspect ratio < 3

Pattern shape: Pillar, Grating, Pinhole, Channel, etc.

Materials: Si-wafer, Quartz, Sodalime glass, Metal, etc

Application

microfluidic platforms for point-of-care testing, anti-reflective structures ect